시험분석연구센터

1. Size : 49(W) × 67(H) × 30(D) cm
2. Scan length : 10 mm
3. Scan speed : 2 μm/sec to 200 μm/sec
4. Scan method : Bi-directional moving stylus, stationary stage
5. Sampling rate : 50, 100, 200, 500, 1000 Hz
6. Vertical range/resolution : - 20 μm / 0.0119 Å, - 400 μm / 0.228 Å
- 2 mm / 1.19 Å
7. Stylus force : 1-100 ㎎ manually adjustable
8. 2 ㎛ Radius stylus 45 Deg
9. Variable Image magnification : 70 ~ 210 ×
10. Step height repeatability : 8 Å or 0.1 %
11. Scan access : measures any point on a 160 mm diameter
12. Maximum sample stage movement : - X = 151 mm, - Y = 80 mm, - R = 360°
13. Maximum sample thickness : 21 mm
14. Maximum sample weight : 1 kg