에이아이티
CMT-SR3000S
10년
주장비
분석
전기·전자장비 > 분석장비 > 달리 분류되지 않는 분석장비
2006.04.07.
₩83,490,000
기관의뢰
고정형
시간별
₩10,000
_ 4_point probe head pin spacing : 1mm_ Direct current 4_point method_ Measurement repeatability : ●0.5%_ Current source 10nA to 100mA"1. 4_point probe head _ Pin spacing : 1mm _ Pin load : 100g _ Pin radius : 100 ~ 150 microns2. Sheet resistance measurement _ Direct current 4_point method _ Measuring range : 1m ohm/sq ~ 1M ohm/sq3. Measurement repeatability ?Q 0.5%(CV at 5 times/center 1 point, VLSI Standard wafer when 23→)4. Current source _ 10nA to 100mA _ Accuracy : '÷0.1% to '÷0.5 %5. High accuracy X_Y actuator _ Min. pitch is 0.1mm _ X_Y accuracy of position: '÷50┢m _ Probe accuracy of position: '÷50┢m
_ 4_point probe head pin spacing : 1mm_ Direct current 4_point method_ Measurement repeatability : ●0.5%_ Current source 10nA to 100mA"1. 4_point probe head _ Pin spacing : 1mm _ Pin load : 100g _ Pin radius : 100 ~ 150 microns2. Sheet resistance measurement _ Direct current 4_point method _ Measuring range : 1m ohm/sq ~ 1M ohm/sq3. Measurement repeatability ?Q 0.5%(CV at 5 times/center 1 point, VLSI Standard wafer when 23→)4. Current source _ 10nA to 100mA _ Accuracy : '÷0.1% to '÷0.5 %5. High accuracy X_Y actuator _ Min. pitch is 0.1mm _ X_Y accuracy of position: '÷50┢m _ Probe accuracy of position: '÷50┢m