플렉서블전자소재센선(FEMC)

ㅇXeCl excimer laser
- Coherent LPXproTM 305
- Center wavelength (nm): 308
- Max. Pulse Energy (mJ): 700 @10Hz
- Max. Stabilized Pulse Energy (mJ): 600 @50Hz
- Max. Rep. Rate (Hz): 50
- Max. Stabilized Avg. Power (W): 30

ㅇBeam delivery optics
- LB200
- Line beam length (mm): 200
- Line beam width (um): 400
- Max. energy density in homogenized filed at - substrate: 450mJ/cm2(@96%)

ㅇPrecision stage
- Min. Moving range: X >100 mm, Y >450 mm Z ±5 mm
- Max. Moving speed: X, Y 200 mm/s
- Min. Substrate plate: 300 mm x 300 mm
- Vacuum chuck

ㅇControl module
- Main control software : Windows-based GUI software

ㅇAdditional module
- Power meter & Beam profiler
- Line beam cutter range: 0 ~ 200 mm