대구뿌리기술지원센터

① Furnace Frame & Case
② Insulation
- Ceramic Board 1400,50t 3 매
- Ceramic Board 1200.50t 5 매
- Ceramic Fiber & Adhesive
③ Control System
- Prog ram PID Controller (UP55A)
- SCR Unit (380V/3Φ /50 A)
- Thermal couple (K-Type)
- Main Breaker Switch
- Power Limit System
- Transformer
④ Heating System
- SiC Heater
(Φ 12 × 400 × 1000 mm) 4면 배치
- Alumina Hanger
⑤ Gas System
- Flow Meter N2, Ar, H2
- SUS Pipe 316L
- SWG Fitting
- Pressure Valve
- Pressure Sensor
- H2 Burning system
⑥ Water Cooling System
⑦ Vacuum System
− Oil Rotary Vacuum Pump
− Low Vacuum T/C Gauge(KVC)
− Oil Mist Trap
⑧ Chamber :SUS310
- 규 격 : 350(W) × 350(H) × 450(D)/mm
- Camber Body
- Chamber Flange & Door
- Chamber In/Out Port
- Clamp
- 표면처리
⑨ Binder Trap
- 규 격 ø 216 (W) × 450(H))/mm
- B and Heater