대구뿌리기술지원센터

1. FE-SEM
- Resolution : 0.6nm guaranteed at 15kV, 0.7nm guaranteed at 1kV, 1.0nm guaranteed at 0.5kV
- Magnification : x25 to x1,000,000(Photo mode)
- Image type : Secondary-electron Image, Backscattered-electron Image(Compo, Topo and Shadow)
- Accelerating voltage : 0.01 to 30kV
- Probe current : A few pA to 500nA
- Electron Gun : In-lens Schottky field-emission gun
- Specimen stage : Full eucentric goniometer stage
- Specimen exchange : Load lock Chamber, Single touch chucking
- Specimen exchange Chamber : Load lock Chamber Type 2 (100mm dia. x 40mm height)
- Specimen movements : X, 70mm, Y, 50mm, Z, 2 to 41mm, T, -5 to + 70˚, R, 360。 Endless(moter driven)

2. EDS
- AZtec live with ultim max detector
- Ultim extreme detector: Ultimate spatial resolution and low energy performance for EDS in the SEM
- Ultim Max Large Area Analytical Silicon Drift EDS Detector, 100mm2
- Energy resolution ≤127eV at 130,000cps

3. EBSD
- Symmetry detector, CMOS type
- Image sensor : High-speed, Low-noise CMOS, customised for EBSD
- Image size : 1,244 x 1,024 pixels(max.)
- Digitisation : 12 bit(on-sensor)
- Optics : Custom design, high efficiency, high-sharpness
- Screen format : Rectangular;matches and uses full area of sensor
- Screen phosphor : Optimised for best performance across all applications
- Top acquisition speed : more than 3000pps
- Acquisition speed at megapixel resolution : more than 240pps
- Large area mapping available