(주)인포비온
ISB-1000
5년
주장비
생산
기계가공·시험장비 > 반도체장비 > 전자빔증착기
2017.01.22.
₩1,033,623,800
기관의뢰
고정형
시간별
₩150,000
1. 시스템 특징(System features)
1) Deposition materials : TaO2, SiO2, HfO2, NiCo, etc.
2) Radial film thickness uniformity : < 0.5% (across 300mm diameter planet)
3) Multi layer ion beam sputtering deposition
4) 4ea × 300mm planetary type for substrate holder
5) Substrate rotation : 300rpm(max)
6) 3 each 14“ diameter target with water cooled backing plates
7) Ion beam sources with neutralizer for sputtering & assist
(Ø140 RF ICP three grid type, self aligned ion optics grid assembly)
8) Dual thickness monitoring system
(quartz oscillator type deposition controller & optical thickness controller for deposited mass
and optical thickness)
9) PC based automatic system operation
2. 시스템 구성(System configuration)
1) Process chamber module 1 set
2) Vacuum pumping system 1 set
3) Vacuum measuring module 1 set
4) RF ion source module 2 set
5) Gas injection system 1 set
6) Substrate holdering module 1 set
7) Target holdering module 1 set
8) Film thickness monitor/controller module 1 set
9) Operation & control system 1 set
3. 시스템 구성 소개(Introduction of system configuration)
1) Process chamber module
(1) Cylindrical type chamber with front door
(2) Material : STS-304
(3) View port with shutter
(4) Shield plate kit
(5) Ports for pumping, venting, gauge, windows, 2-ion beam guns, gas supplies, valves, etc.
(6) Chamber frame
2) Vacuum pumping module
(1) Dry pump(Low-Vac)
(2) Turbo molecular pump(High-Vac)
(3) Cryo pump(High-Vac)
(4) High Vac gate valves
(5) Chamber roughing valve(Slow & Fast)
(6) TMP foreline valve
(7) Cryo pump roughing & purging valve
(8) Chamber venting valve
(9) Pumping lines
3) Vacuum measuring module
(1) Full range gauge
(2) Pirani gauges
(3) Absolute pressure transducer
(4) Atmospheric pressure switch
4) RF ion source module
(1) ∅14cm RF ion beam source for sputter
(2) ∅14cm RF ion beam source for assist
(3) RF neutralizer
(4) 1,000W RF power supply
5) Gas injection system
(1) MFC for Ar, 50sccm
(2) MFC for O2, 20sccm
6) Substrate holdering module
(1) Substrate mounting kit
(2) Substrate rotation kit
(3) Substrate heating unit
7) Target holdering module
(1) Target mounting kit
(2) Target rotation kit
(3) Target cooling system
8) Film thickness monitor & controllers
(1) Quartz crystal film thickness monitor/controller
(2) Optical thickness monitor/controller
9) Operation & control system
(1) 19“ rack mount
(2) Industrial computer & multi serial communication ports
(3) PLC
(4) System control program
1. Process chamber module 1 set
1) Vacuum chamber 1 set
(1) Type : Cylindrical type chamber with front door
(2) Material : STS-304
(3) Size : ∅1,000mm × 750mmH
(4) Electro polished surface
(5) Port : Pumping port, gauge port, venting port, viewport, ion beam port, thickness monitor port, substrate holder port, target rotation port, spare port, etc.
2) Shield plate kit 1 set
(1) Material : STS-304
(2) Electro polished surface
3) View port with shutter 2 set
(1) Material : STS-304, tempered glass, etc.
4) Chamber Frame 1 set
(1) Material : SS400(Powder coating)
2. Vacuum pumping module 1 set
1) Dry pump(Low-Vac) : 1 set
(1) Pumping speed : > 3,000ℓ/min
(2) Ultimate pressure : < 5 × 10-3 torr
(3) Inlet/outlet port : DN 63 ISO-K / NW40
2) Turbo molecular pump(High-Vac) 1 set
(1) Pumping speed : > 1,280ℓ/min(Ar)
(2) Port : ISO 200
3) Cryo pump(High-Vac) 1 set
(1) Pumping speed : 1,400ℓ/min(Ar)
(2) Ultimate pressure : < 10-9 torr
4) Valves
(1) High Vac gate valve(genera) 1 set
- Operation : Pneumatic
- Mounting flange : ISO 200
(2) Chamber roughing valve(Slow & Fast) 1 pc
- Pneumatic operation
- Inlet/outlet : NW50
(3) Cryo pump roughing valve 1 pc
- Pneumatic operation
- Inlet/outlet : NW25
(4) Cryo pump purge valve 1 pc
- Pneumatic operation
- Inlet/outlet : 1/4“ VCR
(5) TMP foreline valve 1 pc
- Pneumatic operation
- Inlet/outlet : NW40
(6) Chamber venting valve 1 pc
- 1/2“ pneumatic(Fast)
- 1/4“ manual + 1/4” pneumatic(Slow)
5) Pumping lines 1 set
(1) Material : STS-304
3. Vacuum measuring module
1) Full range gauge 1 set
(1) Measuring range : 5 × 10-9 ~ 1,000mbar
(2) Mount orientation : anyway
(3) Mount flange : NW25
2) Pirani gauges 1 set
(1) Measuring range : 5 × 10-4 ~ 1,000mbar
(2) Mount flange : NW16
3) Absolute pressure transducer 1 set
(1) Full scale pressure range : 0.1 torr
(2) Resolution : 0.001% of full scale
(3) Materials exposed to process : Inconel and Incoloy nickel alloys
(4) Mount flange : NW16
4) Atmospheric pressure switch : 1 set
(1) Pressure range : 0.0 ~ -101.3KPa
(2) Mount flange : 1/4“ VCR
4. RF Ion Source Module
1) ∅14cm RF ion beam source 2 set
(1) RF discharge power(max) : 1,000W & 1.8MHz / RF auto matching
(2) Beam current(max) : > 500mA
(3) Voltage range : 100 ~ 1,200V
(4) Beam size @ grids : 14cm Ø(maximum)
(5) Neutralizer : Non-immersed
(6) Beam shape : Divergent
(7) Typical flows : 5 ~ 40sccm
(8) Pressure : < 0.5mtorr
(9) Ion optics(self align) : OptiBeamTM
(10) Q’ty of grid : Three
(11) Grids : Molybdenum
(12) Height : 9.9“
(13) Diameter : 9.7“
(14) Feedthrough direct : 12“CF
2) RF neutralizer 2 set
(1) Gas feed & flow : 5 ~ 6sccm Ar
(2) Tight electron control : Emission current regulation
3) 1,000W RF power supply 2 set
(1) Discharge : RF ICP
(2) Discharge power : 1KW
(3) Discharge frequency : 2MHz(mominally)
(4) Match network : Fixed
(5) Auto matching : Electronic(Frequency)
(6) Ion optics(DC) : Beam : 1,500V & 1A, Accelerator : 1,500V & 1A
(7) Neutralizer : Integrated & Regulated
(8) Emission current(max) : > 1A
(9) Enable/stand-by control : Discharge & Beam
(10) Operation modes : Auto, manual, & gas
(11) Supervision & control : RF discharge, ion optics, neutralizer & gas
(12) Mass flow control : Four MFCs
(13) Recipe storage : Four
(14) Remote control : Analog & RS232
(15) Height : 15.75“(40cm)
5. Gas injection system 1 set
1) Mass flow controller(MFC) 4 ea
(1) Gas : Ar
(2) Full scale ranges : 50sccm
(3) Control range : 2% to 100% of F.S.
(4) Accuracy(analog) : ±1.0% of F.S.
(5) Fitting : 1/4“ VCR
2) Mass flow controller(MFC) 2 ea
(1) Gas : O2
(2) Full scale ranges : 20sccm
(3) Control range : 2% to 100% of F.S.
(4) Accuracy(analog) : ±1.0% of F.S.
(5) Fitting : 1/4“ VCR
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