레이저시스템산업지원센터

1. 시스템 특징(System features)
1) Compact system design for small foot printing
2) High speed processing for high throughput (Max. speed = 2,000mm/s)
3) High power laser (> 100W) with green wavelength(515nm) and picosecond pulse(< 10ps)
4) Scanner optic system and objective optic system
5) X, Y axis precision stage(Split axis type), Z, R(θ) alignment stage
6) Auto focusing module by laser displacement sensor
7) Aligning and monitoring module by CCD camera
8) Laser safe system and enclosure in Class 1
9) Particle suction module with air flow control and clean booth
10)Complete automation and control solution with unique and easy user interface software(with CAM tool)