화학신소재기술센터

1. System Configuration
1-1. Main Frame

Scan Head
- Light source : 405 nm LD Laser safety standard: Class 2
- Detection system : Dual confocal optical system and Photo multiplier tube
- Optical zoom : 1x to 8x
- Scale resolution : Laser scale 0.8 nm
- Display resolution : 1nm
- Driving resolution : 10 nm
- Driving method : Up and down movement of revolving nosepiece 10mm stroke
- Accuracy : 0.2+1/100L um or less (L = Measurement length um)

Z Focusing
- Maximum acceptable sample height : 100 mm

XY stage
- 100 x 100 mm motorized stage
- Maximum load capacity : 3 kg

XY measurement
- XY Resolution : 0.12um
- Accuracy : Within ±2% of the measured value

1-2. Objective lens
MPLFLN5X 108x -864x 2,560 um -320 um 20.00 mm 0.15
MPLFLN10X 216x-1728x 1,280 um -160 um 11.00 mm 0.30
MPLAPON20XLEXT 432x-3,456x 640 um - 80 um 1.00 mm 0.60
MPLAPON50XLEXT 1080x-8640x 256 um -32 um 0.35 mm 0.95
MPLAPON100XLEXT 2160x-7280x 128 um -16 um 0.35 mm 0.95

1-3. Controller
OS : Windows 7 Professional 64bit
HDD: 2T
Memory : 16GB

1-4. Monitor
Monitor size : 24 inch WUXGA 1,920 x 1,200

1-5. Anti Vibration Table
Total Size(mm) : 1300 × 700 × 750
Isolation Size(mm) : 400 × 500
Work space : 800
Type : Isolation System
Undershelf

1-6. Operating & Measurement Software