본 장비는 u-PCD방식을 이용해 Sample의 minority carrier lifetime 측정할 수 있는 장비임.
Lifetime 측정은 Block/wafer와 Thinfilm을 측정 할 수 있는 각각의 모듈로 구성됨
1. u-PCD for Si Block/Wafer - Measured property: minority carrier lifetime - Suitable material to measure: blocks, as-cut wafers, lapped wafers, diffused wafers, coated wafers, finished cells, mono-, multicrystalline and EFG material. - Laser spot diameter: 1 mm. - Measurement range: 0.01 μs ~ 30000 μs or wider - Resistivity range of the measured sample:0.1 ~ 1000 Ohmcm or wider - Repeatability: <3% - Measurement time: 10 ~ 300 ms/datapoint 2. Thinfilm lifetime measurement - It should be able to gets information about excited carrier density and carrier mobility for thinfilm lifetime measurement - It should be able to measure short lifetime (blow 5ns lifetime value)
1. 기존의 sample과 박막증착 및 표면처리 실험 후 제작된 sample의 Carrier lifetime 변화를 비교측정하고자 할 때 사용.
2. 환경적 변화에 따른 Carrier lifetime 변화를 측정하고자 할때 사용.

1. Sample size : 210mm wafers, 270x156x156 blocks
2. Available scanning resolution : 62.5um ~ 64mm
3. Laser spot diameter : 1mm
4. Measurement range : 0.01 us ~ 30000us
5. Measurement time : 10 ~ 300ms/data point