(1) Reactor
- Quartz, 210mm diameter, 62mm height
- Viewing port on front panel
(2) Parallel-plate electrodes
- Upper electrode : Aluminum, 140mm diameter, shower head
- Lower electrode : Aluminum, 120mm diameter, liquid cooled
(3) RF Power
- 13.56MHz, O-200W solid state generator
- Digital readout of forward and reflected power
(4) Vacuum System
- Chemical serieds, 2-stage rotary pump, 290liters/min, with flowmeter for nitrogen purged gas ballast
(5) Pressure measurement
- Pirani-gauge, 10-3 to 10Torr
(6) Gas Inlet Lines
- Two rotameter for CF4 and oxygen, 5~50SCCM (other gas calibrations available upon request)
- One nitrogen purge line
(7) Process Timer -
Digital (0.1-second resolution)
(8) Audio Alarm -
Alert operator when process is finished
(9) Operation -
Sequence controller for automatic operation of vacuum system, gas valves and RF power
(10) Safety features
-Door interlock ensures system is inoperable when reactor door is open
- Reset switch for immediate process halt, evacuation of process gases, and chamber vent
(11) Utilities Requirements
- Power : 115VAC, 60Hz, 3KVA
- Cooling water : 2~3kg/cm2, 1~2liters/min
- Process gases : 1kg/cm2
- Nitrogen : 1kg/cm2, 10liters/min
- Venting : Exhaust duct for rotary pump, NW25
(12) Dimensions [W×D×H mm]
- 400×440×325
(13) Local supply
- Automatic Pressure Control Unit
(1) One -button operation after set up of process recipe
(2) Accommodates one 4" wafer or multiple die or packaged devices
(3) Audio alarm signals completion of run
(4) Safety features protest system and operator
(5) Sleek compact design
(6) Operation small footprint cart saves benchtop space
- 실리콘 표면의 나노/마이크로 식각을 통해 광포획효과를 극대화 함으로서, 태양전지의 perfomance에서 전류값과 FF값을 상승시킬수가 있음
- 다양한 나노/마이크로 형태 구현과 형성된 구조체의 높이와 폭을 제어함으로서,다양한 태양전지 효율의 gain을 얻을수 있음
○ 다양한 박막소재(실리콘, 산화물, 금속 전극 등)의 식각 시험을 위한 공정
장비로서, SiNx, SiOx의 stripping 및 유전박막소재의 에칭등에 활용
○ PR 또는 PS의 Ashing 공정을 통한 Size effect에 관한 시험 등 가능
○ 다수의 박막태양전지 회사의 관련 수요 예상

(1) One -button operation after set up of process recipe (2) Accommodates one 4" wafer or multiple die or packaged devices (3) Audio alarm signals completion of run (4) Safety features protest system and operator (5) Sleek compact design (6) Operation small footprint cart saves benchtop space