HORIBA
UVISEL2
주장비
분석
광학·전자 영상장비 > 광파발생/측정장비 > 달리 분류되지 않는 광파발생/측정장비
2013-06-27
210,215,274원
원
본장비는 UV-VIS, NIR을 이용하여 190 ~ 1000 nm 의 파장을 이용하여 재료를 측정한다.
분광식 두께 측정 장비로써, 빛의 특성을 이용하여 재료에 투사시켜 물질이 갖는 고유한 물리적 특성 값을 이용하여 두께 및 굴절율을 측정한다.
-196 도에서 350도 까지 승온 및 냉각을 하며 측정이 가능하다.
Allows spectroscopic ellipsometry measurements through windows of the heating stage in high vacuum while the sample temperature is varied between -196 ℃ and 350℃. and then ellipsometer system must feature automated angle of incidence with vertical sample mount.
Spectral Range : 190nm to 1000nm, 670 wavelengths more better.
Measurement Quantities
1) Ellipsometry : ψ (0°~90°) and Δ(0°~360°)
Is= Sin2Ψ . CosΔ and Ic= Sin2Ψ . SinΔ
2) Transmission intensity : % Transmission
3) Reflection intensity : % Reflection
4) Depolarization : % Depolarization
Spectral Resolution Bandwidth(UV/VIS) : 0.06nm more better.
Automated Sample Stage
1) Sample Translation
- Automated 200mm by 200mm X, Y translation
- Software control the mapping
- Positioning accuracy : 5um
- Max sample thickness : 40mm
2) Automated Tilt
Motorized tilt adjustment of the sample
- Based on reflected Laser on 3D CCD camera
- No anymore autocollimation system
3) Automtic adjustable goniometer
- Automated angle(35° to 90°), horizontal sample stage. Automated Z-height adjustment.
- Accuracy : <0.1° or better
- Repeatability : < 0.005°
본장비는 UV-VIS, NIR을 이용하여 190 ~ 1000 nm 의 파장을 이용하여 재료를 측정한다.
분광식 두께 측정 장비로써, 빛의 특성을 이용하여 재료에 투사시켜 물질이 갖는 고유한 물리적 특성 값을 이용하여 두께 및 굴절율을 측정한다.
Spectral Range : 190nm to 1000nm, 670 wavelengths more better.
Measurement Quantities
1) Ellipsometry : ψ (0°~90°) and Δ(0°~360°)
Is= Sin2Ψ . CosΔ and Ic= Sin2Ψ . SinΔ
2) Transmission intensity : % Transmission
3) Reflection intensity : % Reflection
4) Depolarization : % Depolarization
Spectral Resolution Bandwidth(UV/VIS) : 0.06nm more better.
Automated Sample Stage
1) Sample Translation
- Automated 200mm by 200mm X, Y translation
- Software control the mapping
- Positioning accuracy : 5um
- Max sample thickness : 40mm
2) Automated Tilt
Motorized tilt adjustment of the sample
- Based on reflected Laser on 3D CCD camera
- No anymore autocollimation system
3) Automtic adjustable goniometer
- Automated angle(35° to 90°), horizontal sample stage. Automated Z-height adjustment.
- Accuracy : <0.1° or better
- Repeatability : < 0.005°