우성하이백
Thermal Evaporator
5년
주장비
시험
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2013-02-26
68,000,000원
원
금속이나 산화물반도체 등을 열 에너지로 증착시켜 박막을 형성하는 장비다. 또한, 인쇄 전자소자의 주 재료가 되는 유기물은 산소나 수분에 민감하게 반응하여 전기적 성질이 저하되는 현상이 있어, 소자를 inert gas 분위기 하에서 제작해야만 하는데, 질소로 충진된 glove box내에 증착기를 장착함으로 안정성있는 소자를 제작할 수 있다.
A. Process chamber
- Dimension : φ450 x 500H (Front rectangular door)
- Material : STS304
- Substrate holder
Heating : Max 900℃
Rotation & Tilt : 0 ~ 50RPM
- Boat for metal
- Temp control ±1℃/ max 1200℃
- Vacuum pumping port : 8"dia, screen mesh
- Glove box gas(Ar,N2) vent valve
B. Vacuum pumping unit
- Cryo pump : 1000ℓ/sec
- Scrol pump : 300ℓ/min
- Vacuum valve : ISO100 angle valve
- Vacuum valve : 1"Angel valve (Metal seal type)
- Piping : STS NW40 , flexible tubing
- Vacuum gauge : Full range gauge
- Full automatic pumping process control system by PLC
C. Power supply & system controller
- Power supply accurancy : ±0.1V
- Cross-contamaination shields
D. System control
- Interlock system for cooling water & over current
- Semi auto control system
- 19"rack
- Glove box frame 사용
E. Thin film deposition controller
- 1A/sec rate resolution
- 1A thickness resolution
- RS 232 Data logging
- Six measurements channels
- Output signal shutter control
F.Glove box WP1500S Main lab
- Dimension : 1500L 780D 870H
- Material : stainless steel 304
- Front view panel : Polycabonate Plate
- Glove : butyle 9"dia 32"length 0.4t
- Light : 20w 형광등 * 4
- Accessories : 2단 선반
전원콘센트 220V, 110V 각4구
- 전면 경사각 : 10˚
- Spectrometer feedthrough 8ea
- PMT Detector case
- UV-cross linker feedthrough
G. Ante chamber (Oven type)
- Double side open & Front door open type
- Dimension : φ350 x 550L
- Heating Slid tray : 200℃
- Vacuum port : NW25 Ball valve
- Vacuum gauge : Digtal vacuum gauge
H. Purifier
- WP2200S
- H2O, O2 removal catalyst
- Vacuum tight blower WB40 외장형
- Regeneration : PLC auto control
- Regeneration : H2 4% Mixed Ar gas
- Removal of O2, H2O 0.1ppm
I. Pressure control
- Pressure range : ±5 inch of H2O
- Digtal pressure sensor
- Acurracy : 0.1mbar
- Over pressure safty system
- Foot switch
J. Frame
- Dimension : 1500L x 700D x 900H
- SS41 steel structure, Painted
- Foot master anchor, GD80F
K. Scroll pump
- 200L/min,
L. System control
- Full automatic touch pannel control
- O2/ H2O ppm display
- Box pressure display
- Regeneration process display
- circulation/ stand by/ regeneration display
M. Dew point meter(수분측정기)
- Dew point meter(moisture analyzer)
Sensor type : silver spot
Dew point range : -100 ~ -20℃
Moisture content : 0~1000ppm
Accuracy : 1ppm
Power : 230/ 110V AC
N. Oxygen anglyzer
Display : multi-digit LCD
Programmable 4 to 20mA output
Panel mounting with two clamps
Range : 0.1 to 1000ppm, two user configurable alarm
금속이나 산화물반도체 등을 열 에너지로 증착시켜 박막을 형성하는 장비다. 또한, 인쇄 전자소자의 주 재료가 되는 유기물은 산소나 수분에 민감하게 반응하여 전기적 성질이 저하되는 현상이 있어, 소자를 inert gas 분위기 하에서 제작해야만 하는데, 질소로 충진된 glove box내에 증착기를 장착함으로 안정성있는 소자를 제작할 수 있다.
A. Process chamber
- Dimension : φ450 x 500H (Front rectangular door)
- Material : STS304
- Substrate holder
Heating : Max 900℃
Rotation & Tilt : 0 ~ 50RPM
- Boat for metal
- Temp control ±1℃/ max 1200℃
- Vacuum pumping port : 8"dia screen mesh
- Glove box gas(ArN2) vent valve
B. Vacuum pumping unit
- Cryo pump : 1000ℓ/sec
- Scrol pump : 300ℓ/min
- Vacuum valve : ISO100 angle valve
- Vacuum valve : 1"Angel valve (Metal seal type)
- Piping : STS NW40 flexible tubing
- Vacuum gauge : Full range gauge
- Full automatic pumping process control system by PLC
C. Power supply & system controller
- Power supply accurancy : ±0.1V
- Cross-contamaination shields
D. System control
- Interlock system for cooling water & over current
- Semi auto control system
- 19"rack
- Glove box frame 사용
E. Thin film deposition controller
- 1A/sec rate resolution
- 1A thickness resolution
- RS 232 Data logging
- Six measurements channels
- Output signal shutt