(주)에이치앤에너테크
개발장비
부대장비(부가장치) (주장비:)
데이터 처리장비 > 하드웨어 > 입/출력장치
2014-10-31
46,475,000원
원
플라즈마 건식 제염설비에 자동적으로 전원공급, 가스공급, 온도설정, DC power 공급을 제어하기위한 장치
1.2.3 Loading Chamber
1) Material : SUS304
2) Electro Polishing
3) Halogen Lamp (220V, 1Kw 10EA)
4) Photo Sensor
5) Vacuum Gauge Sensor
6) Thermo Couple Port
7) 6”View Port (Door Type)
8) Roller Part
9) Pumping Port (NW40)
10) Manual Vent Valve
1.2.4 Plasma Chamber
1) Material : SUS304
2) Electro Polishing
3) RF Power Supply
4) DC Pulse Power Supply
5) Photo Sensor
6) Vacuum Gauge Sensor
7) Gas Inlet Port
8) 6”View Port & Shutter (Door Type)
9) Roller Part
10) Pumping Port (NW40)
11) Manual Vent Valve
12) Sheath Heater
1.2.5 Unloading Chamber
1) Material : SUS304
2) Electro Polishing
5) Photo Sensor
6) Vacuum Gauge Sensor
8) 6”View Port (Door Type)
9) Roller Part
10) Pumping Port (NW40)
11) Manual Vent Valve
12) Unloading Door
1.2.6 Pumping Unit 1) Rotary Pump : 1000 L/Min, 220V, 3상 1EA 1000 L/Min, 220V, 3상 1EA 2) Pumping Port : NW40
3) Roughing Valve : NW40 Angle Valve
4) THROTTLE Valve : 3/8” DIAPHRAGM Valve 1.2.7 Control 1) M.F.C : M3030V (AR : 1ea, N2 : 1ea, O2 : 1ea, NF3 : 1ea)
2) Vacuum Gauge : Convetron Gauge 3EA
3) Vacuum Gauge Controller : KVC4000 4) Pumping Control : Switch Panel Control 5) M.F.C Readout : KRO-4000 6) RF Power Controller 7) DC Pulse Power Controller 8) Motor Speed Controller 3EA 9) Heater Controller 2EA