1. Resolution : 3.0nm (30KV, SE Image)

2. Magnification : x15 ~ x300,000

3. Image : Secondary electron image(SEI)

4. Accelerating voltage : 0.5KV ~ 30KV

5. Electron gun : W (Tungsten), Pre-align cartridge filament

6. Lens system : 3rd reducing system

7. Objective iris : 4th portable aperture

8. Image shift : +/-50um (WD : 10mm)

9. Full Auto Stage(5-axis): X (40mm), Y (60mm), Z (5 ~ 60mm), R (360°), Tilt: -20° ~ 90°

10. Specimen Size(Max) : 160mm

11. Scanning Mode

- Reduced window (320 x 240 pixel)

- TV Mode (640 x 480 pixel)

- Slow screen scan mode (800 x 600 pixel)

- Photo screen capture mode I(1280 x 960 pixel)

- Photo screen capture mode II(2560 x 1920 pixel)

- Photo screen capture mode III(5120 x 3840 pixel)

12. Image format : JPG, TIFF, BMP,PNG

13. Image Display : 21.5" LCD Monitor

14. Automatic control

- Auto gun alignment

- Auto Contrast@Brightness

- Auto Focus

- Auto Stigmator

- Auto filament satulation

15. Working Distance : 5 ~60mm

16. Vacuum System : Fully Automation

- Roughing: Rotary pump

- High vacuum : Turbo Molecular pump

17. Control system : PC Controlled by PCI

- Operating system : Windows XP, Vista

18. S/W :

- 길이, 각도, 면적등 Measuring 기능