나노시스템
NV-2000
주장비
분석
광학·전자 영상장비 > 달리 분류되지 않는 광학·전자 영상장비 >
2014-02-12
87,000,000원
원
제작사 : 나노시스템
모델명 : NV-2000
표준분류 : 광학·전자 영상장비 > 달리 분류되지 않는 광학ㆍ전자 영상장비
설명 : 비접촉식 방법으로 0.1nm~270㎛까지 3차원표면 형상을 고정도, 고속측정이 가능하며, 터렛을 이용한 간편한 배율조정과 정합기능 사용으로 넓은 면의 세밀한 분석이 가능
Measurement Method Non-contact, Three-Dimensional,
White-Light Scanning Interferometry (WSI)
Phase Shift Interferometry (PSI)
ZOOM Lens Selectable Single ZOOM Lens
See Options
Objective Lens See Options Scanning Method 16bit LVDT Closed-Loop Controlled Piezo Scanning
Measurement Array (CCD) 640 x 480, 1/2”
Tip/Tilt Stage Manual, Head Tip/Tilt, ± 6°
Coarse Z Stage Manual, 100mm
See Options
Fine Z Stage Manual, 30mm
XY Stage Motorized, 100x100mm
Workpiece Table 230x230mm, Max Load < 5Kg
Objective Turret Manual, 5 Objective Lens Available
Illumination Computer Controlled 100W Tungsten Halogen Lamp Controller Stand-alone Motion Controller
Computer Latest HP Compaq, 17” LCD
OS Windows XP
Software Operation Software: NanoView
Analysis Software : NanoMap
Stitching Function Available
Vibration Isolator > 1.8Hz Vibration Isolated *Computer Work Table is provided. Physical Dimension(WxDxH) Machine, 480 x 630 x 680mm
Isolator, 750 x 750 x 710mm
Weight Machine, 80Kg
Isolator, 80Kg
Performance Specifications Scanning Range 270um
See Options
Scanning Speed High Accuracy Mode, 2.4um/sec
High Speed Mode, 7.2um/sec
Step Height Repeatability < 0.5% (1σ), Step Height Standard with High Accuracy Mode Vertical Resolution WSI < 0.5nm
PSI < 0.1nm
Field of View Depends on ZOOM / Objective Lens
See Field of View Chart
Lateral Sampling Depends on ZOOM / Objective Lens
See Lateral Sampling Chart *Step Height Repeatability is depends on environmental conditions. Environmental Requirements Ambient Temperature < 23℃±2.0℃ (1.0℃/15min)
Room Air Humidity < 60%
Foundation Grade At least VC-B Utility Electric Power 220V±5%, 60Hz, Single-phase
Air Pressure > 6.0Kgf/cm2 , Inlet Ф6mm Accessory Objective 5x, 10x, 50x Interferometry ZOOM Lens 0.55x ZOOM Lens