1. Scanning/Controller
1) Workstation
- Scan range (x, y, z) ≥ 110 mm
- Scan motor resolution ≤ 9.76 nm
- Closed loop positioning : Linear zero hysteresis encoder with direct real-time readout
of displacement in x, y and z
- Axis resolution (x, y, z) ≥ 20 nm
- Max. scan speed ≥ 10 mm/s
- Measurement resolution : 32-bit decoder @ up to 40 MHz
2) Piezo (ic- techniques)
- Vibration range : 20nm - 2μm peak to peak with 1 nm increments
- Min. vibration resolution ≤ 0.12 nm calculated (16-bit DAC on 4 μm)
- Piezo crystal extension ≥ 100 μm
- Positioning resolution ≤ 0.09 nm calculated (20-bit DAC on 100 μm)
- Topology resolution (recorded) ≤ 1 μm
- Positioning -probe to sample surface : autonomous
3) Mechanical and electrical
- Scan head ≥ 500 x 400 x 675 mm (H x W x D)
- Scan control unit ≥ 370 x 450 x 420 mm (H x W x D)