1. LIQUIDE ARGON GAS TANK (1set)
1) Capacity : 15,800L
2) Pressure : Design Working 1.00 Mpa
3) Temperature : -196’c
4)Type : Perlite Powder Vacuum Insulation

2. AUTO OPERATED CRYOGENIC PUMP (2sets)
1) Capacity : 300 Nm3/hr
2) Pressure : working 15 Mpa
3)Temperature :-185’c
4) Motor : 380V * 15 HP

3. Electric panel ( Out door self standing type)
4. Automatic valve 및 장축밸브
5. Vaporizer (기화기) : Capacity : 300 nm3/hr, Pressure : 15 Mpa (1set)

6. ASME 규격 Gas (Ar) Storage Vessel
1) 용량: 1,300 Liter X 1 bottle X 1 set = 1,300 Liter
2) 수량: 1 bottle for clean gas, (future : 1bottle for reclaim tank )