Tektronix

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반도체 디스플레이 측정 장비

I-V Source Measure Units (SMUs)
• ±210 V/100 mA or ±210 V/1 A modules
• 100 fA measure resolution
• 10 aA measure resolution with optional preamp
• 10 mHz – 10 Hz very low frequency capacitance measurements
• 100 µF load capacitance
• 4-quadrant operation
• 2 or 4-wire connections
C-V Multi-frequency Capacitance Units (CVUs)
• AC impedance measurements (C-V, C-f, C-t)
• 1 kHz – 10 MHz frequency range
• ±30 V (60 V differential) built-in DC bias, expandable to ±210 V (420 V differential)
• Simple switching between I-V and C-V measurements with the optional CVIV Multi-Switch
Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)
• Two independent or synchronized channels of high-speed pulsed I-V source and measure
• 200 MS/s, 5 ns sampling rate
• ±40 V (80 Vp-p ), ±800 mA
• Transient waveform capture mode
• Arbitrary waveform generator for multi-level pulse waveform with 10 ns programmable resolution
High Voltage Pulse Generator Unit (PGU)
• Two channels of high-speed pulsed V source
• ±40 V