1 Scanning Electron Microscope (PE-100) 5AXIS
1) Magnification : x20 ~ x300,000
2) Detector (SE,BSE)
3) Accelerating Voltage : 0.5~30 kV
4) Electron Gun (Tungsten filament)
5) Lens System (2Condenser, Conical Objective lens)
6) Objective Aperture (Hole size : 200 µm, 100 µm, 50 µm, 30 µm)
7) Image Shift (WD=10 mm, +/-20um )
8) Stage (X (50mm), Y (50mm), T (-20~45°), Z (4 to 50), R (360°)
9) Scanning Mode (Live scan, Photo scan)
10)image Format (BMP, JPEG, TIFF, PNG)
11)Display (2560 x 1440(QHD) / 24“)
12) Convenient Function
13) Working Distance (WD 4 mm ~ 50 mm)
14) Vacuum System (rotary pump, Turbo Molecular Pump)
15) Control System (Keyboard, Mouse, Win 10)
16) S/W Measuring Functions
17) Spare Parts
4. 실습 커리큘럼
- 발주기관 교과목 담당 교수와 협의로 반도체 분석 계측 실습교육 실습자료 제공
- 실습 매뉴얼 및 실습 전용 소프트웨어 포함