1) Confocal(continuos confocal), Interferometry (PSI, ePSI, CSI), AI FV and Thickness 3D Optical profiler
- Motorized 6-hole Nosepiece
- 4 high-output LED light sources: blue(460nm), green(530nm), red(630nm), white(575nm)
- Scan speed: maximum 180 fps and < 1 sec
2) Positioning device
- XY scanning stage: Motorised
a. Travel range: 114 x 75 mm or more
b. Reproducibility: ±0.2um
- Z scanning stage: Motorised
a. Travel range: 40mm or more
b. Reproducibility: 0.1nm
3) Objective
a. Confocal: LWD 10x, 20x, 50x, 100x
b. Interferometry: LWD 5x, 10x, 20x
c. Fusion Optics: 20.5 : 1 zoom rate
4) Video
a. Color and BW : Maximum 60 FPS
5) Software
a. Automation: Support and development of plug-ins suitable for applications