1) Electron optics
(1) Electron Beam Resolution
High-vacuum mode:
- 0.8 nm at 1 kV or less
- 0.6 nm at 15 kV or less
- 0.9 nm at 300V/500V or less

(2) Accelerating voltage : 200V-30kV or wider
(3) Beam Current : Up to 50nA or more
(4) Magnification : 5x to 1,000,000x or wider
(5) Source: Schottky
- High-stability Schottky field emission gun to provide stable high-resolution
(6) User alignment free technology
(7) Selected area electron channeling mode
(8) Guaranteed minimum source lifetime: 24 month or more
(9) Pivot Beam System
(10) Beam deceleration Mode

2) Detector
(1) Everhart-Thornley secondary electron detector
(2) In-lens, In-column detectors (At least 2 detectors)
(3) Retractable Back-scattered Detector
(4) Chamber integrated Navigation Camera
(5) In Chamber CCD IR Camera

3) Vacuum system
(1) 1x 240 l/s turbomolecular drag pump or more
(2) 1x scroll pumps or more
(3) 2 x ion getter pumps or more
(4) Integrated battery backup for IGPs on the electron column
(5) Auto bake-out and Auto-start enable fast and easy maintenance of FEG source

4) Chamber
(1) Inner width: 340 mm or bigger
(2) Max. sample size: 122mm or bigger
(3) Analytical Working Distance: 10mm or less
(4) Port capability: 10 or more
(5) EDS take-off angle: 35°

5) Stage
(1) Eucentric goniometer 5 axes motorized
(2) X = 110 mm or more
(3) Y = 110 mm or more
(4) Z = 40mm or more
(5) T = -5° / +70° or wider
(6) R = 360° continuous
(7) Stage repeatability: 3um or less

6) System control & imaging
(1) Computer control system
- Microsoft windows 10 software
- LCD Monitor: 24 inch or higher
(2) Manual User interface
(3) Triple monitor stand
(4) Images are displayed in an area of 1280 x 960 pixels or more configurable for either single-frame or four-view display
(5) Images can be saved in TIFF, BMP, JPEG file formats, and in 8-bit, 16-bit or 24-bit depth
(6) The software includes a 4-view live mode
(7) Automated acquisition S/W of image mosaics
- Provides automated acquisition of image mosaics and offers
complete control on location, resolution and imaging parameters.
- Provide multiple mosaic acquisitions on a single sample, or on
multiple samples loaded in the chamber and re-align and collect
data over multiple imaging sessions.

2. 부속장비
(1) EDS system

- Active area of 60mm2 or more
- Energy resolution ≤ 129eV at Mn k-alpha
- Norvar window with proprietary evacuated tube design for detection sensitivity to Be
- Motorized slide for software controllable insertion / retraction
(2) Acoustic Enclosure for Pre-vacuum Pump
(3) Compressor: Oil free type: 230V, 50/60 Hz with 4-liter Tank or more
(4) Air-cooled Water Chiller 230V, 50/60 Hz
(5) UPS 5kVA
(6) Anti-Vibration Table: Active Type