○ 기본 사양
1) 핵심 요구 성능
- 측정범위: (X,Y) 300 mm x 300 mm
- Radial Error motion (um) : ≤ 0.1
- Axial Error motion (um) : ≤ 0.1

2) 세부사양
- X-ray Tube Focal Spot Size : ≤0.25um
- Radial Error Motion(um) : ≤ 0.1
- Axial Error Motion(um) : ≤ 0.1
- Beam Angle : ≥ 120˚
- FID(focus to II Distance) : ≥ 500
- 최대기판 : ≥ 12“
- Max Detector Tilt : ≥ 60˚
- X-Ray Safty : ≤ 1um/svh
- 회전각 : 360˚