1. Base Unit
(1) Stage repeatability : ±2 um or less
(2) Operating temperature : 22 ℃ ± 3 ℃
(3) Sample detection/loading range : 200×200 mm or similar
(4) Back-side of chip analysis should be available
- For both photo and thermal emission analysis
- Fix method : Individual magnetic fixation
2. Lenses
(1) NIR Lens : at least 2 lenses(must included 5x or less & 20x or more)
(2) MWIR Lens : at least 2 lenses(must included 1x or less & 5x or more)
(3) 1 Macro lens must included
3. Photon Emission Camera System
(1) Sensor type : InGaAs image detector or similar
(2) Pixel resolution : 640 x 512 or more
(3) Spectral response : 900 ~ 1550 nm or wide
(4) Sensor pixel pitch : 20 um or less
(5) illumination for pattern imaging (Navigation) : LED
(6) Live emission mode included
(7) Background subtraction feature
(8) Large suite of software tools including hotspot overlay
(9) multi-tile mosaic and die-to-die comparison

(10) Cooling method : Thermoelectric cooler or similar
(11) Cooling temperature : -30 ℃ or less
4. Thermal Emission Camera System
(1) Sensor type : InSb image detector or similar
(2) Pixel resolution : 640 x 512 or more
(3) Spectral response : 3.0 ~ 5.2 um or wide
(4) Sensor pixel pitch : 20 um or less
(5) NETD(Noise Equivalent Temperature Difference) : 20 mK or less
(Low resistance Short Failure detection : 1 Ω or less)
(6) Thermal image dynamic range : 13 bit or more
(7) Frame rate (Hz) : 330 or more
(8) FOV (Field Of View) : 200 × 150 mm or more
(Measurable at once in a large area PCB/Mobile Panel)
(9) External trig input available(External Trigger Function : synchronized with InSb Camera, tester and power supply)
(10) Cooling method : Stirling cooler or similar
(11) Cooling temperature : Approximate -70℃
(12) Thermal Lock-in function included
- Max Voltage / Current (1) DC ± 40 V / 1 A or more
(2) DC ± 6 V / 3 A or more
5. Laser Scan System
(1) Frame rate : 1 frame/s @ 512 × 512 or more
(2) Spatial Resolution : 1.3 μm or less
(3) Rotation : 0 ~ 270 ° or more
(4) Wavelength : 1340 nm or less
(5) Scan resolution : 256 × 256 ~ 1024 × 1024 or various
(6) Scan Zoom level : 2x ~ 8x or various
6. IR-OBIRCH function unit
(1) Voltage Mode 1 - Input V : ±20 V / Current range : ±100 μA or similar
(2) Voltage Mode 2 - Input V : ±10 V / Current range : ±100 mA or similar


(3) Detectability : 3 pA or less
(4) Lock- in frequency(Digital lock-in unit) : 0.7813 ~ 20 kHz or various