1) Plasma FIB Column / SEM Column Main Body, and Embedded Microscope S/W controlled in UI 1 set
2) Sample Lift-out NanoManipulator System (Including rotation) 1 set
3) 5-Axes Eucentric Stage 1 set
4) In-lens detector for SE & BSE 1 set
5) In-column detectors (low voltage & low loss SE & BSE detector) 1 set
6) In-chamber electron and ion detector 1 set
7) Secondary Electron Detector 1 set
8) Retractable Back-Scattered Detector 1 set
9) In-Chamber Navigation Camera 1 set
10) CCD-IR Camera for in-chamber viewing 1 set
11) Charge Compensation system 1 set
12) Gas Injection System (e.g., Pt, C, W) 1 set
13) Multi Purpose Specimen Holder 1 set
14) Inert Gas Sample Transfer loader 1 set
15) Integrated Plasma Cleaner System 1 set
16) Full Automated TEM Sample Preparation Software 1 set
17) Full Automated Slice and View 3D Software 1 set
18) Full Automated Serial Sectioning and Imaging Software 1 set