1. Scan Range Programmable up to 200mm, Measurement Range 1 to 4,000MPa, Repeatability 1.3MPa, Accuracy Less than 2.5% or 1 MPa (whichever is larger), Minimum Radius 2.0m, Maximum Radius 33km, Wafer Sizes (mm) 25, 50, 75, 100, 150, 2- Standard detector, laser, optics, servo-motor mirror controller, computer controller, kSA software, complete steel frame enclosure with lockable wheels, and uninterruptable power supply with voltage regulation
2. Built-in flat and 10m radius of curvature reference mirrors
3. Standard sample holder for 50mm, 75mm, 100mm, 150mm, 200mm, and 300mm diameter samples
4. Fully programmable XY scanning stage with options for line scans, selected area mapping, and full area mapping
5. kSA 2-D and 3-D mapping and analysis software
6. One kSA analysis only software license (M-AOS) for offline data analysis on a separate computer