1. Performance
1) Information limit : 0.06 nm
2) STEM resolution : 0.05 nm
3) Acceleration voltage : 80 ~ 300 kV
4) Wide Polepiece
2. Electron gun (Field Emission Gun(FEG))
1) Energy resolution : 0.2-0.3 eV / 0.03eV
3. Double Cs corrector
1) Tuning process should be automatic software
4. STEM imaging system
1) BF(Bright Field), ABF(Annular Bright Field) imaging mode
2) ADF(Annular Dark Field) imaging mode
3) HAADF(High Angle Annular Dark Field) imaging mode
5. Multi atomic resolution imaging system 
1) 2 images or more images, simultaneously
2) 2 image acquisition of BF, ABF, AADF image
6. Diffraction analysis system 
1) The system should be able to obtain the diffraction pattern
of the sample using a CCD camera
2) Convergent beam diffraction, nano/micro-diffraction mode
7. Energy Dispersive Spectrometer (EDS) system
8. Electron Energy Loss Spectroscopy (EELS) system