1. Induction Plasma System
  1) RF Power Supply: 15kW
  2) Induction Plasma Torch
2. Electrical: 3Phases(DELTA), 50/60Hz, 34kVA 
3. Cooling: Deionized water and control
4. Gas
  1) Supply 
    ⦁ Argon: 40-60 slpm
    ⦁ Hydrogen: 10-15 slpm
    ⦁ Plasma Aux (N2): 10-30 slpm
    ⦁ Quench Aux for Nano (N2): 0-200 slpm
  2) Exhaust: 
    ⦁ Outside: 100-200 slpm   
5. Process Chambers (Synthesis system): 
  1) Reactor
    ⦁ Stainless steel water-cooled, double wall construction,
  2) Cyclone
    ⦁ Stainless steel water-cooled, double wall construction,
    ⦁ Internal surface of the chamber is polished (Ra15)
 3) Collector
   ⦁ Stainless steel non water-cooled
   ⦁ Filtration element (0.1 m2)
6. Powder Feeders
 1) Particle range: 1um and lower
 2) An ultrasonic vibrator
 3) Resolution of +/- 1gr