1. 일반 사양(General Specification)
1) X-ray Source Type : Opened or Sealed
2) X-ray Voltage : 160kV 이상
3) X-ray Power : 16W 이상
4) Resolution : 500nm 이하
5) Pixel Size : 60nm 이하
6) Radiation safety: <1µSv/h 미만
2. X-ray Detector System
1) Ultra High Resolution : Objective+CCD(40x)
2) High Resolution : Objective+CCD(20x)
3) Standard Resolution : Objective+CCD(4x)
4) Low Resolution : Objective+CCD(0.4x)
3. X-ray Filter System
1) Number of Filter Position : 5개 이상
2) Filter Element : Al, Cu, Al+Cu
4. Stage
1) Sample Size : 300x300mm 이상
2) Load Capacity : 25kg 이상
3) X-Stage Movement : 50mm 이상
4) Y-Stage Movement : 100mm 이상
5) Z-Stage Movement : 50mm 이상
6) Scanning Volume : 70x65mm 이상
7) Scanning Type : Round or Rotation
8) Rotation Accuracy : 50nm 이하