1. Electron optics
1) High stability Schottky thermal field emitter or Cold-cathode field emission type
2) Electron Beam Resolution
- 0.6 nm at 15 kV or less
- 0.9 nm at 1 kV or less
3) Accelerating voltage range : 500 V to 30 kV or wider
4) Magnification : x20 to x2,000,000 or wider
5) Sample landing voltage : Min. 20 V or less
6) Fully automated optic alignments should be supported.
2. Detectors
1) Detector : Dual or more secondary electron detector should be built-in.
2) Detecting signals
- SE(Secondary Electron)
- BSE(Backscattered Electron)
- SE + BSE mixing
3) Camera navigation system
4) Chamber view
3．SDD type EDS (129 eV)
1) LN2 free type detector
- SDD detector, 60㎟ or larger active area
- Energy resolution : 129 eV
- Detecting element range : Be(4) to Am(95) or wider
2) Data signal processing unit
3) Analysis software : SU8600 operation program