1. 장비개요
- Package surface temperature control technolgy
- Real-time temperature monitoring & Storage
- External size : 1600(W)*1400(D)*2373(H)
2. 온도 시스템
- 1 Target = 1 Temperature control
- 1 Target = 1 Temperature sensing
- 25℃ ~ 150℃ temp range < range 2℃ stability
3. 파워시스템
- 0V ~ 30V/20A power range *7unit
- 0V ~ 30V/20A power range *1unit
- 200ms power response time
- Power on/off step & voltage, current control_Power GUI
4. 안전장치
- Over current detection - heater, power
- Thermal detection - heater, pneumatic, power
5. Vector 시스템
- Signal information(input lever) - VIH : 0.8V, VIL : 0.2V
- Vector data speed rate : 2Gbps ~
- Maximum number of input : Max 24differential signal per 1 target package
- Memory : 15Mbit per 1 target package