1. Motorized Probe system
1) Motorized optical system (X, Y, Z stage) 제공
- Resolution : 0.15 um (공통)
- Max range : 〉±15 mm (공통)
2) 조각 웨이퍼 및 패키지 시료 장착 가능
3) 프로빙을 위한 상부관찰 현미경 장착 필요
4) Micro-manipulator (Vacuum type) 수량 : 4개 이상 제공
5) Anti-Vibration table 장착
6) Chuck size : 200 mm 이상 지원

2. Photon Emission Camera (광자검출 카메라)
1) Sensor : InGaAs image detector
2) Spectral response : 950 nm ~ 1500 nm
3) Cooling method : Liquid Nitrogen
4) Pixel number : 1,000(H) x 1,000(V)
5) Cooling temperature : < –170 ℃

3. Thermal Emission camera (열방출검출 카메라)
1) Sensor : InSb image detector
2) Pixel number : 512(H) x 512(V) 이상
3) Spectral response : 3500 nm ~ 5000 nm
4) NETD : 50 mK(@25 ℃) 이하
5) Lens : 서로 다른 배율의 MWIR Lens 3ea 이상 장착

4. IR OBIRCH function
1) Minimum current detection : < 10 pA
2) Input voltage range : > ±20 V
3) Measuring current range : > ±90mA

5. Laser Scanning unit
1) Wavelength : 1300 nm ~ 1350 nm
2) Max Power : > 350 mW 이상
3) Connection type : Fiber
4) Laser source : High power IR-LD

6. Nano Lens (Solid Immersion Lens) unit
1) Magnification (NanoLens + High NA lens) : 〉200 x
2) Total NA (NanoLens + High NA lens) : 〉3.0
3) Transmittable Wavelength of NanoLens : 1.0 um ~ 1.5 um
4) Si lens for silicon thickness : 80 um, 750 ~ 800 um 2가지 제공



7. Digital Lock-in function 지원
1) Modulation method : Laser power modulation
2) Lock In Frequency : 1 kHz ~ 20 kHz

8. Thermal Lock-in function 지원
1) Modulation wave for Lock-in : Rectangle or Sine
2) Output power : 1 Line
3) Max voltage / Current range
① DC ± 40V / Current rage : ±1A
② DC ± 6V / Current rage : ±3A
4) Voltage adjustable : < 2mV
5) Repeatable frequency : 0.1 Hz ~ 0.5 kHz
6) Interface for control PC : RS-232C

9. Optics 사양
1) Lens switching method : Motorized lens exchanger
2) High NA Macro Lens : 1.35x 1개
3) Objective lens for OBIRCH : 1x 1개
4) Objective NIR Lens : 서로 다른 배율 2개 이상 (예 : 5x, 20x)
5) Objective MWIR Lens : 서로 다른 배율 3개 (예 : 1x, 5x, 10x)
6) Nano Lens : 1개