Kleindiek nanotechnik
PS4
10년
부대장비(부가장치) (주장비:나노분석주사전자현미경)
시험
기계가공·시험장비 > 반도체장비 > 프로브스테이션
2022-12-19
336,314,110원
기관의뢰
고정형
시간별
[Hr] 460,000원
EBIC Localization analysis, EBIC Quantitative analysis, Safe Tip Approach, Signal Switching Box 등 소프트웨어 자동컨트롤 기능 및 Advanced Probing Tools 업그레이드로 분석정확도 향상
1. Low noise bulk
1) Bulk allows low-current, low-capacity measurements on conductive sample.
2) Prober shuttle is modified to add bulk and the upgrade consists of prober shuttle
mounting kit(AK-PS4), low current measurement kit (PL-LCMK1), new vacuum
feedthrough, triax feedthrough, vacuum flange, air-side/vacuum side triax feed cables.
2. Nanocontrol Controller 6.0
1) Control electronics with four output channels. Operation is possible using knobs, a
joypad or PC software via USB. The joypad, PC software, required cabling and power
supply are included.
2) 16 bit Digital Analog Converter is included
3. EBIC/EBAC with remote control
1) Applications:
Non-destructive failure analysis, open and short detection in integrated circuits,
visualization p-n junctions, localization of resistivity changes, visualization of grain
boundaries in solar cells.
2) Current measurement limit 100 fA
3) Gain to V/A
4) Bandwidth up to 1MHz
5) Video output 1V/50Ω (customizable)
6) External voltage input
7) Large offset range
8) AC and DC amplification modes
9) Image inversion mode
10) Input current compensation
11) Selectable bandwidth filter
12) Quantitative EBIC/EBAC
4. iProbe
1) Provides the most flexible and intuitive way to control up to twelve
micromanipulators through six orders of magnitude.
2) The mouse is for X and Y movement and a jog dial is for Z movements
5. APT-Package LCT for up to Four Probes
1) LCT(Live Contact Tester) provides visualizing each tip’s electrical status by
simultaneously recording ten I-V curves per second on each tip. the tips’ electrical
response to a given bias voltage can be seen in real-time.
2) The LCT is augmented by three additional modules:
Tip2Tip test and Transistor Test, Signal Routing
3) Tip voltage range –10 to +10V (16 bit DAC)
4) Current range 100uA to 2mA
5) Three predefined scan speeds
6) The Transistor test module record an entire family of Ids vs Vds curve ten times per second.
7) The Tip2Tip test module measure the resistance between two tips. It can be
used to break through contaminating oxide layers on the tips.
8) The Signal Routing Module switches the signal leads to the desired measurement device or output.
6. APT-Package Tip Cleaning
1) The tip cleaning module entails carefully driving current through two crossed tips in
order to heat them and evaporate any contaminants.
7. MHS200, Heating Stage 200°C
1) The heating stage is supplied with a temperature control unit which allows the
stage to be heated from room temperature up to 200°C
2) Dimensions
-Diameter 16mm
-Overall height 10mm
-Pin length 6mm
-Pin Diameter 3.2mm
3) Temperature range at air: RT - 100°C
4) Temperature range in vacuum: RT - 200°C
5) Temperature resolution: 1°C
6) Temperature stability of sensor: Better than 0.05% at 200°C after 1000 h
7) Temperature accuracy: 0.5%
8) Analog voltage output accuracy: 0.5% (after offset correction)
9) Heating-up time from room temperature:
- 100s to 100°C, 200s to 200°C (in vacuum, depending on vacuum level)
10) Cooling-down time from 200°C:
- 200s to 100°C, 600s to 45°C (in vacuum, depending on vacuum level)
11) Pressure range: 1E-7 mbar to 1200 mbar