1) Ion gun : Ga liquid metal ion source
- Resolution : 4.0nm at 30kV
- Edge resolution : 60nm
- Beam current range : 1pA ~ 100nA or more
- Acceleration voltage : 0.5 ~ 30kV or more
2) Electron gun : Cold-type Field emission electron source
- Resolution : 0.7nm at 15kV, 1.5nm at 1kV
- Real-time SEM monitoring during ion beam processing
- Accelerating voltage : 0.35 ~ 30kV
3) Signal detection system
- In-column SE (Secondary Electron) detector, 1set
- In-column BSE (Back Scattered Electron) detector, 2sets
- Chamber SE (Secondary Electron) detector, 1set
- CCD camera for chamber viewing, 2sets
4) Load-lock chamber including air-protection system & holder
5) 5-axis motorized stage for loading 150mm diameter
6) Gas injection system : 2 channel or more (C, W)
7) Cut & see function : set up to min. 1nm/step
8) 3D reconstruction software
9) Energy dispersive spectrometer
- Detector type : LN2 free type silicone drift detector
- Energy resolution : 127eV at MnKa
- Detecting sensor size : 100mm2
- Maximum input count rate : 1500kcps
- Detecting element range : Be(4) to Cf(98)