1) Resolution : 0.6nm@15kV / 0.7nm@1kV
2) Electron gun : Cold-type Field emission electron source
3) Landing voltage : 0.01kV
4) Signal detection system
- In-column SE/BSE (Secondary Electron) detector, 2sets
- Chamber SE (Secondary Electron) detector, 1set
- 5 or more segments type BSE detector, 1set
5) Load-lock chamber including air-protection system & holder
6) 5-axis motorized stage for loading 150mm diameter
7) Wide area fabrication function with air-protection and cooling method
- Milling width : Max. 8mm
- Milling speed : 1mm/hr (Based on Si)
- Cooling range : -100℃ or less
8) Dual EDS system
- Windowless type EDS detector for Li detecting
- Large sensor EDS detector(100mm2) for high speed analysis and mapping