- 3D Optical Profiler w/3.5nm vertical precision
- SureScan&SmartSetup
- Camera: 1024 x 1024 pixels or more
- Manual tilt stage with 4 deg tilt and motorized 100mm Z stage
- Mx software for acquisition and analysis on a Windows 10 system controller
- Motorized 100x100mm XY Sample stage kit / HR3D Optical Profilers mounts to the integrated manual tilt stage & accommodates samples load of up to 10kg
- The motorized stage enables automated patterns & field stitching using Mx software
- Repeatability of RMS : 0.1nm
- Data Scan Speed : 32㎛/sec
- Step Height Repeatability : ≤ 0.3% @1σ
- Step Height Accuracy : ≤ 3%