Thermo Fisher Scientific
Helios 5 UX
5년
주장비
시험
광학·전자 영상장비 > 현미경 > 주사전자현미경
2022-06-20
1,545,399,143원
기관의뢰
고정형
시간별
[EA] 150,000원
해당 집속 이온빔 시스템 장비는 이온빔과 전자빔 소스를 갖고 있는 전자 현미경임.
전자빔으로 미세조직을 관찰하면서 이온빔을 이용하여 원하는 부위에서 3차원 국소 원자단층현미경 관찰용 나노 탐침 샘플 또는 투과전자현미경 관찰용 박편 시료를 제작하는 장비임.
○ SEM Electron Optics
- Source type : Schottky field emitter mounted on the NG hot-swap gun
- Landing energies : adjustable 20 V to 30 kV
- Beam Current : 0.8 pA - 100nA
- Resolution : • 0.6 nm at 15 kV to 2kV
• 0.7 nm at 1 kV
• 1.0 nm at 500 V
- In-lens SE and BSE detection
- magnification : 3 ~ x 1,280,000
- maximum horizontal field width : 2.3mm at beam coincident point
○ FIB Ion Beam Optics
- Voltage: 500 V to 30 kV
- 2 IGP pumping system
- Beam current: 0.1 pA - 65 nA (15 steps aperture strip)
- Resolution: 4.0 nm @ Using preferred statistical method
2.5 nm @ Using selective edge method
- maximum horizontal field width : 0.9mm at beam coincident point
○ Standard 5-axes motorized stage:
- High precision 5-axes piezo motorized stage
- X,Y : 100 mm, piezo-driven
- Z : 20 mm motorized
- T : - 10° to + 60°
- R : n x 360° (endless), piezo-driven
- Tilt accuracy (between 50° to 54°): 0.1°
- X, Y repeatability: 0.5 μm at 50° to 52° tilt
- Stage control software includes standard facilities for:
• Store and recall of sample position
• Multi-directional stage drive
• Compucentric rotation
• Image feature alignment to horizontal or vertical
○ Detectors
- In-lens SE detector (TLD-SE)
- In-lens BSE detector (TLD-BSE)
- Everhart-Thornley SE detector (ETD)
- In-column SE detector (ICD)
- In-column BSE detector (MD)
- IR camera for viewing sample/column
- In-chamber sample navigation camera (Nav-Cam)
- Retractable low voltage, high contrast solid-state electron detector (DBS)
- Integrated beam current measurement
○ NanoManipulator system
- Software control integrated into the DualBeam user interface
- Motorized 360º control of needle rotation
- Smallest step size <50 nm
- Omni-directional repeatability < 100 nm
- True ‘Z’ movement of 500 nm over a 5 µm Z stroke
- Drift <200 nm/ min
○ Chamber
- E-beam and I-beam coincidence point at analytical WD
- Chamber inner size 379mm(Ø)
- 21 ports