○ Scanning Electron Microscope
∎ Resolution
- SEI : 3.0nm at 30kV(High vacuum mode)
- BSE : 3.5nm at 30kV
∎ Detector
- SED : YAG Crystal SE-ET type
- BSE : YAG Crystal type(0.1 Atomic resolution)
∎ Accelerating voltage : 200V ~ 30kV
∎ Electron beam current : 1pA ~ 2uA
∎ Magnification : ×2 ~ 1,000,000
∎ High vacuum range : < 9×10-3 Pa
∎ Low vacuum range : 7 ~ 500 Pa
∎ Stage motor accuracy : 1um
∎ Specimen stage : computer eucentric stage(5 axis motorized)
- Movement X : 80mm, motorized
- Movement Y : 60mm, motorized
- Movement Z : 47mm, motorized
- Tilting angle : -80 ~ 80°, motorized
- Rotation : 360°, motorized
∎ Elctron gun : W hairpin filament
- Electron beam life time check mode(included)
∎ Automatic function
- Electorn gun alignment
- Spot size optimization
- Multifunction auto step
- Auto focusing
- Stigmation
- Bright & Contrast
- Filament saturation
∎ Frame store
- 16,384×16,394 pixel