1. Chamber Outer Tube, Quartz, 1ea.
2. Chamber Inner Tube, Quartz, 1ea.
3. Chamber Exhaust Plate, Quartz, 1ea.
4. Mass Flow Controller, H2, 100mln/min, Metal sealed, 2ea.
5. Mass Flow Controller, H2, 200mln/min, Metal sealed, 2ea.
6. Mass Flow Controller, H2, 500mln/min, Metal sealed, 2ea.
7. Mass Flow Controller, H2, 1,000mln/min, Metal sealed, 2ea.
8. Mass Flow Controller, H2, 2,000mln/min, Metal sealed, 2ea.
9. Mass Flow Controller, H2, 5,000mln/min, Metal sealed, 2ea.
10. Pressure Controller, H2, 1,900mln/min, 2ea.
11. Dry Pump, 1ea
- ESA25D 사양조건
- 최대 배기속도(60Hz)기준 : 3,000 L/min 이상.
- 도달압력(60Hz기준) : 4 Pa 이상.
12. Throttle Valve Controller, 1ea.
(Type – 651C, RS-232)
- External Analog : 0~5 or 0~10 VDC
- Controller Repeatability : ±0.1% of F.S.
- Output Power Standard : ±15VDC ±5@0.5Amp
- Connectors
* Valve : 9-Pin Type “D” Female
* I/O : 37-Pin Type “D” Female.
* Transducer : 15-Pin Type “D” Female.
* RS-232 : 9-Pin Type “D” Male
13. Throttle Valve, 1 ea.
(TYPE 253B, DN40F, Valves with a Flapper O-Ring)
- Speed(open to close) Standard 7.5 sec 이하
- Drive Method : Mechanical(None belt) Drive
- External Leakage at Shaft Seal : 1 x 10‾7 cm³/s He 기준
- Closed Leakage : < 10‾7 (Torr 1/s)
14. 3/2 Valve (1/4”VCR-FFF, PV), 1 ea.
15. 5/2 Valve (1/4”VCR-MMMFF, PV), 1 ea.
- Flow Coefficient : 0.19%
- Orifice Size : 3.5mm
- External Sealing : < 1 x 10‾7 ATM cm³/s He
- Internal Sealing : < 1 x 10‾7 ATM cm³/s He
16. MBRAUN Moisture Analyzer (MB-MO-SE1), 1 ea.
- Flange : DN40KF
- Supply Voltage : 24V DC ±10%
- Plug : RJ45, 8 pins(Ethernet-like plug)
- Pressure : 800 ~ 1200 mbar.
- Effective range : 0 to 500 ppm moisture
- Sensitivity : 20 mV/ppm
- Response Time apporx. 120sec.(0-90%)
- Accuracy High Precision Range(0-10ppm) : ±(5% of displayed value +1ppm)
17. MBRAUN Oxygen Analyzer (MB-OX-SE1), 1 ea.
- Flange : DN40KF
- Supply Voltage : 24V DC ±10%
- Plug : RJ45, 8 pins(Ethernet-like plug)
- Operating Temperature : +15°C to 27°C
- Pressure :: 800 ~ 1200 mbar.
- Effective range : 0 to 500 ppm Oxygen
- Sensitivity : 10 mV/ppm
- Response Time apporx. 10sec.(0-90%)
- Accuracy : ±(2% of displayed value + 1ppm)
- Drift : 10%/year(@10ppm)