가. Main Body with X,Y,Z축 이동 가능 모듈
1) X,Y,Z 포함 이동 축
- Granite Based Structure with Full Enclose with Stainless Steel Cover
- Basic XYZ (Servo Motor Ballscrew Drive + Linear Encoder)
- C Axis with Direct Drive Motor Axis For Table Rotation
- XY Max Working Stroke 400mm x 400mm.
- XY Max Patterning Coverage at 330mm x 360mm
- XYZ repeatability 5um
- XYZ accuracy +/- 10um
- XYZ Built-in 0.5um Resolution Linear Encoder
- Manual Head Tilting Angle Bracket
- Built-in Needle XYZ Calibration & Cleaning System
2) Patterning Vision
- Built-in CCD Vision Calibration System
- Number of Pixels : 808 x 608 Pixels
- FOV : 4.5 x 3.5mm
- Built-in Needle Monitoring Camera & Display
3) 기타 구성
- Built-in Patterning Controller with Programmable Air Pressure Regulation
- Built-in Hepa Fliter
- Uiversal Work Table with Vacuum Suction Port Ready
- Universal Heater Plate & Controller
- SP Pump Integration Kit
- Pump Mounting Adaptor Ready (SP, HM2, PP4+)
- Advance Control Software
- Window Based Operated System
나. SychroPulse Valve
1) Disp Head, Valve Unit, Pulse Tube
2) Temperature Stabilizer System for SP
3) Needle 100um (5 pcs/set
4) Consumable Parts Set
다. Confocal Sensor for meausring patterning height
1) Intelligent Confocal Chromatic Displacement
2) White LED Light Source, Ethernet / EtherCAT
3) RS422 & analogue output, 24Vdc Supply, IP40 Aluminum housing
4) Intelligent Confocal Chromatic Displacement Sensor
5) Measuring Range 10.0mm
6) Working Distance 27 m
라. Weight measurement
- 0.01g weight measurement