1. Field Emission Scanning Electron Microscope
1) Electron Optics:
- Electron Gun : High brightness Schottky emitter
- Resolution : 0.6 nm at 15kV or better, 0.9 nm at 1kV(BDM) or better
- Electron Beam Energy : 50 eV to 30 keV or wider
- Probe Current : 3pA to 100 nA or wider
- Mag : x5 ~ x2,00,000 or wider
2) Vacuum System :
- Chamber Vacuum : High Vacuum Mode: 10-3 Pa or better, Low Vacuum Mode: Max. 500 Pa or better
- Dimensions : 340 mm(width) x 315 mm(depth) x 320 mm(height)
- Number of ports : 20+
3) Chamber and column Suspension : active vibration isolation
4) Specimen Stage :
- Type : Compucentric, Fully motorized
- Movements : X = 130 mm or wider, Y = 130 mm or wider, Z = 50 mm or wider,
Rotation : 360° continuous, Tilt : –4° to +70° or wider
5) Detectors & Accessories :
- Everhart-Thornley chamber detector
- In beam or In lens SE detector
- In beam f-BSE or In lens BSE detector
- Mid-angle BSE or AsB detector
- YAG LE BSE detector
- Low vacuum SE detector
- Active Type Anti-vibration system
- Integrated plasma cleaner(Decontaminator)
- Operation Software
- Beam Deceleration Technology(BDT)
- Operation PC & Widow 10 & Keyboard, Mouse, Track ball, Control panel
- 32inch monitor
- Chamber view (IR) camera
- pA Meter : Probe Current Measurements
- Touch Alarm : Stops movements when sample touches any part of the chamber
6) Image size : Up to 16k x 16k pixels or betterƒ
7) Automated operations :
- SEM emission control
- Electron gun and column alignment
- Contrast and brightness, autofocus
- Electron beam spot optimization
8) Software :
- Measurement
ƒ - Image Processing
ƒ - Customizable GUI layout
- Multi-user account management
- Quick search bar
- Undo / Redo commands
- Single, dual, quad or hexa live image(s) display
- Multi-channel colored live image
9) User Key :
The locking/reloading features of the microscope setup, as well as loading conditions from previously acquired images, saves the time to get another image in the same quality.
10) Dynamic Focus :
Scanning in a tilted plane is now possible by changing the working distance during scanning dynamically. You will get an extraordinary depth of focus for scanning in a tilted plane.
11) DCFA : Drift corrected frame accumulation.
2. Cryo preparation System
1) Gas cooled preparation chamber
2) Cryo stage and Cold trap
3) Cryo transfer device – including vacuum storage
4) Turbomolecular pumping – high vacuum performance
5) Cold gas cooling system with 21liter LN2 dewar or more
6) Micrometer controlled fraturing device with tooled steel blade
7) Cooling to –190 ℃ or more
8) Temperature stability : < 0.5 ℃
9) Automated sublimation, coating and system start up
10) Touch-screen control via panel PC