1. Analysis Chamber (Q-Mass)
1-1 Analyzer
a) Analyzer : Quarupole Mass Spectrometer (Microvision2)
b) Sensitivity: 0.01ppmw (5g sample)
c) Dynamic range: 1 to 100 a.m.u.
d) Detection method: Dual method (Faraday Cup/SEM 전환방식)
e) Hydrogen background: 5.0 x 10-9Pa or lower
f) Resolution: <10% Valley
g) Ionizer: UHV ion source

1-2 Pumping Capability
a) Ultimate pressure: 5 x 10-8Pa or lower
b) Hydrogen background: 5.0 x 10-9Pa or lower

1-3 Vacuum Pump (Tandem Turbo Molecular Pumps)
a) Main pumps
1. Magnetically-levitated Turbo Molecular Pump (TMP)
(Pumping speed: 320L/s with N2)
(Pump itself: 5 x 10-8Pa or lower)
(Operable Pressure: 1.3~10-8Pa order)
2. Turbo Molecular Pump (TMP)
(Pumping speed: 70L/s with N2)
(Pump itself: 10-7Pa order)
b) Sub (Roughing) pump
1. Oil-sealed rotary pump (Located outside of system frame)
2. Pumping speed: 200L/min
(Pump itself: 2 x 10-1Pa or lower)

1-4 Analysis Chamber (UHV type)
a) Material: SUS 304
b) Inner surface treatment: Electrolytic compound polishing
c) Degassing: 450 deg.C for 10 hrs
d) Connect Flanges: Conflat flanges (CFF) with metal gaskets (UHV type)
f) Baking temp.: 200 deg.C
g) Isolation device: UHV All metal gate valve between the Analysis chamber
and the Sample Heating Furnace

1-5 Vacuum Pressure Gauge
a) Nude Ion Gauge
b) Pressure range: 10-2 Pa to 3 x 10-9Pa order


1-6 Standard Leak Gas (inject Hydrogen from the furnace)
a) 0.01 ppm (weight %) of Hydrogen can be confirmed.
b) The gas will be injected through All Metal Leak Valve (manual type).
c) The pressure of the Standard Leak Gas Chamber will be stabilized by
the absolute pressure gauge.
d) Leakage: 5.00kPa = 9.24×10-6 atm・cc/S (Degree)
25.00kPa = 4.60×10-5 atm・cc/S (Degree)
50.00kPa = 9.30×10-5 atm・cc/S (Degree)
100.00kPa = 1.90×10-4 atm・cc/S (Degree)

2. Sample Heating Furnace
2-1 Sample Size and Loading Sample
a) Max. sample size: φ20mm x L50mm (No shape restriction)

2-2 Electrical Resistive Heating Furnace
a) Furnace: 2 Divisions, Open/Close type
b) Max. Temperature: 1,000 deg.C (Soaking length: 200mm ±5℃)
c) Heater: 2kW, AC200V
d) Heating Zone: 3 Heating Zones (Uniformity=100mm)
e) Dimensions of Furnace: W300 × D450 × H350mm
f) Dimensions of Reactor: φ40mm × 300mm (length)
g) Dimensions of Reactor Core Tube: φ33mm × φ30mm

2-3 Touch Panel Heater Controller
a) Temp. Set/Ramp Rate Set: Touch panel operation
b) Control Method: PID control with Thermocouple (T/C)
c) Output: 0 to 10V analog output (output to Q-MS)
d) Temp. Ramp Rate Control: Adjustable between 50℃/hr and 600℃/hr

3. Load-Lock Chamber (Preparation Chamber)
3-1 Pumping Capability
a) Max pressure: 5×10-5 Pa or lower
* Time required from sample introduction to evacuation: assuming less than
15 minutes


3-2 Vacuum Pump
a) Main pump
Turbo Molecular Pump (TMP)
(Pumping speed: 280L/s with N2)
b) Sub pump
Oil-sealed rotary pump (Located outside of system frame)
(Pumping speed: 80L/min with N2)

3-3 Load-lock Chamber (UHV)
a) Material: SUS304
b) Surface treatment: Electrochemical polish finish
c) Connect flange: Conflat flanges (CFF) with metal gaskets (UHV type)
d) Baking temperature: 150 deg.C
e) Isolation Device: UHV All metal valve between the load lcok chamber and
the Sample Heating Furnace

3-4 Vacuum Gauge
a) BA(Bayard-Alpert) ionization gauge
Measurement range: 1 Pa~10-7 Pa order

3-5 Sample Introduction Method
a) Using the touch panel, operate the leak valve to purge the chamber w/ N2.
b) Open the hatch to place a sample. Close the hatch.
c) Evacuate the chamber using the touch panel controller.

3-6 Sample Transfer Method
a) Open the gate valve between the Load-lock chamber and the Analysis
chamber.
Use the transfer rod and deliver the sample to the center of the furnace.
b) After the measurement, remove the sample by operating the transfer rod and
the gate valve.

4. Pumping Controller (Baking System)
a) Manual operation of pumping & valve control for Analysis and Load-Lock
chamber
b) Automated operation of pumping & valve control for Analysis and Load-Lock
chamber
c) Vacuum leak operation for Load-Lock chamber.
d) Automated operation of standard leak hydrogen gas introduction and
pumping of gas lines.
e) Temperature setting/control during baking process of vacuum chamber.
Set point signals from vacuum gauges and/or various interlock switches will
help the user to operate the system safely.

5. Hydrogen Data Acquisition System
5-1 Software
a) Q-mass Control Software (Process Eye Professional)
b) Hydrogen Mass Calculation Software (H2 Cal)
c) Display of desorbed hydrogen spectra
d) Calculation of hydrogen mass in a selected temperature range
e) Subtraction of hydrogen background and Calculation of hydrogen mass in
sample (Unit: ppm wt)

5-2 Hardware
a) CPU: Core i5 3.0GHz / 6MB
b) OS: Windows 10 Pro 64bit (English version)
(Office Home and Business 2019)
c) HD: 500GB

6. Accessories
The warranty period of following parts shall be 1 year.
- Oil for Rotary pump (4L) -------------- 1ea
- Alumina for fore-line trap -------------- 1ea
- Spare Cartridge for Oil-mist filter --- 1ea
- Cu Gasket φ34CFF ------------------ 10ea
- Cu Gasket φ70CFF ------------------ 10ea
- Cu Gasket φ152CFF ------------------ 10ea
- 4VCR Gasket ----------------------------- 5ea
- 8VCR Gasket ----------------------------- 5ea