1) Mass resolution at higher mass (> 200 u) : 16,000 (FWHM)
2) Mass range : 12,000 u
3) Min. beam diameter : 50 nm
4) O2 Beam density @ 2 kV beam voltage : 48 mA/cm2
5) Cs Beam density @ 2 kV beam voltage : 12 mA/cm2
6) Sensitivity @ mass resolution at 27 u : 6 x 108Al+/nC
7) Ar Cluster source for organic depth profiling
(1) Minimum beam diameter : 10 um
8) Data process system
9) Accessories