- Helium 측정범위 : 5×10E-12mbar l/S 이하
- Helium Pumping 범위 : 30m3/hour (500ℓ/분) 이상
- Backing Pump 종류 : dry scroll pump
- 가압챔버 내부사이즈 : Ø260 x H400 mm 이상
- 가압챔버 압력범위 : 10 Kgf/cm2 이상
- Test Chamber 내부사이즈 : Ø100 x H180 mm 이상
- 시험규격(ISO 20486 Non-destructive testing - Leak testing, JIS Z 2331 Method for helium leak testing, ASTM F816-83 Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages, ASTM F2391-05 Standard Test Method for Measuring Package and Seal Integrity Using Helium, GB/T 15823 Non-destructive testing - Test methods for helium leak testing)을 만족할 것