○ Schottky thermal field emitter type SEM electron optics
○ Ga liquid metal ion source FIB ion beam optics
○ Gas injection system for etching and deposition: W, C, Pt
○ EDS on FIB System
○ 3D reconstruction software for FIB, EDS, EBSD
○ in-situ systems : Ar polishing system, High vacuum heating stage, Nano patterning tool, Cryo stage