Quantel
Qswitched NdYAG laser system
10년
주장비
생산
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2021-10-25
55,863,410원
기관의뢰
고정형
시간별
50,000원
Nd:YAG Laser system은 Pulsed laser deposition에서 증착 될 물질의 타겟을 타격하기 위해 고출력 펄스 레이저 빔이 사용되며 이러한 레이저 시스템에 대해 충족시키기에 사용된다.
2-1 . Nd:YAG Laser system
A. Features
. Automatic phase matching of harmonics
. 2year full Warranty including optics
. Intuitive touch screen interface
. 100million shots lamp lifetime guaranteed
. Ethernet control
. Precision machined monolithic alloy block
. Uses less than 4 liters of distilled water for the closed air/water cooling loop
. Heating resistance in the cooling group to reduce warm-up time (~10 min)
(no tap water requirement)
. High efficiency ceramic diffuser pumping chamber
. Flashlamps easily changeable by hand unscrewing (no tools) without optical realignment
. Integrated harmonic generation and separation package
. Sealed temperature-regulated housing
. Single thermally stabilized aluminum casting
B. Specifications
. Wavelength: 1064/532/355nm
. Pulse Energy: 850mJ at 1064nm, 430mJ at 532nm, 230mJ at 355nm
. Pulse duration: ~6ns at 1064nm, ~5ns at 532/355nm
. Energy stability(Peak to Peak): +/-2% at 1064nm, +/-4% at 532nm, +/-6% at 355nm
. Power Drift : +/-3% at 1064nm, +/-5% at 532nm, +/-5% at 355nm, (18°
. Beam divergence: 0.5mRad at 1064nm
. Beam diameter: ~9mm
. Polarization: Horizontal at 1064/355nm, Vertical at 532nm
. Repetition rate: 10Hz
. Pointing Stability: <40urad at all wavelength
. Linewidth: ≤0.7cm-1 at 1064nm
. Dimensions: Laser Head - 147mm x 526mm x 125mm
Harmonic module (각각) - 99mm x 123m x 125mm
Power supply - 513mm x 507mm x 283mm
2-2. Optical table
Model SOT 1508R-100T
.Size : 1500 x 800 x 100T
.Tap Hole : M6, 25mm (Diameter 6.2-6.6mm)
.Top Skin : SUS 430 Magnetic
.Flatness of top plate 0.1mm over 1000mmm
.Straightness of bolt hole 0.1mm over 1500mm
.Structure:Honeycomb Core+Top & Bottom Plates
Frame
.Type : Rigid (고정식)
.Height : 700mmH