A. Optics
- 405nm, 레이저 다이오드
- Lifetime: 10,000시간
- Write modes: 0.6um (옵션: 1.5um, 2.5um)
- Intensity: Max. 3mW, 소프트웨어로 조절가능
- Autofocus
B. Top-side Alignment
- Pixel resolution: 1um
- Alignment accuracy: 0.5um
C. Mechanical properties
- Scan speed: Max. 200mm/S
- Substrate thickness: up to 10mm
- Substrate size: Min. 5×5mm, Max. 125×125mm
- Exposable area: Max. 110×110mm
D. Resolution
- High: 0.6um(기본)