1. Vacuum Chamber main body - 1 Set
Vacuum : 10(- 6 torr)_Temp : 10K ~ 570K
Main Chamber Dimension : 230(dia), 250(h)
Windows, Quarts 110mm x 6(t)mm
Safety Door Lock, Manual Hanlde Door
NW 80mm x 6 Port, Wellded Bellows 120mm
NW Multi Port 25mm x 6 Port, ISO 63 for Turbo Port
Main Chuck 80 dia, 2 Jocket, 100/1 Surface uniformity
Cool Down Tank & Hot SID Hitter
Temp Range : 10K ~ 570K, 77K Seed 5min_LN2,
Temp Resolution : ~ 1 c lee than
RTD Temp Sensor & Chuck Surface Holding Type
Hot Chuck Controller, Automatic PID Temp Control &USB Interface
Option Item
Fiber Illumination & Control Available
Bending & Streching
M5VC_04, Vacuum Carrier
2. Vacuum High positioner body unit - 6SET
Manipulator LM lead guide, micrometer knob
X/y/z Fine Manual Handle for Vacuum
Resolution : 1um, Travel : 40mm
Wellded Bellows NW50mm x 120mm
3. Vacuum Positioner Holder - 6SET
TRX 1.5M Cable, TRX Plug for Non Magnet field type
4. Probe Probe Tip_Gold Tungsten -
0.5 x 30mm, 배딩타입,
5. Vacuum Roraty Pumping & Gauge Unit - 1EA
Rotary pump 400L, Power 220V
Auto Vent Tee, Oil Mist Trap Included
Vibration Stopper Frenge NW25
Oil Refill type & Auto Angle Valve
6. Gauge Precision - 1EA
Gauge Unit
Units : Torr, mBar, Pascals
Ionisation, 2-Convection Gauge
IGM400 Ion Gauge Sensor
Range : 5x10E-2 C ~ 1x10-9 Torr
7. Antivibration unit - 1EA
Dual Flange Port NW25
Flexible Bellows 1M x 2
8. System Rack - 1EA
Rack Keyboard Sliding, 4 Step, Ground
9. Main Fraim_Vibration Table_Rack Top_Air - 1EA
Dimension : 900(w) x 770(d) x 1500(h)_Total
Microscope Sliding Rail & Fine X/y Stage
Z Focus Manula Handle, Holding Bong
Air Compressor 6“
10. MFC & Controller - 1SET
MFC 4 CH, 100sccm, N2, Ar
4CH Controller
Automatic Valve & Union Joint
Automatic ValveController
Gas Nozzle Flexible Tube 1/4“ & Holder
11. Vacuum Bending & Streching Precision - 1EA
Vacuum Bending & Streching Motor Motion Control
Bending & Streching Range 50mm x 40mm
Motion Control Consol type
Bending & Streching Measure Software Included
Bending & Streching Consol Controller
12. Tuntale Light Precision - 1SET
Wavelenth : 300 ~ 1400nm
Fiber Lamp : Zenon Lamp 300w
RS232 Interface
13. Fiber Holder Unit - 1EA
Fiber Moving Holder
Fiber Feedthrough & FC Connector
Vacuum In Fiber 25cm, FC Connection
14. Vacuum Carrier_ - 1EA
15. (1) PARAMETER ANALYZER MAINFRAME - 1EA
(2) MEDIUM POWER SOURCE-MEASURE UNIT - 6EA
16. C-V Multi-frequency Capacitance Unit - 1EA
17. Magnet & Power supply - 1EA
Max. Field : 0.5T @ 30mm air gap
Flowrate of cooling water : 4L/min
Bipolar Power supply
AC input 220VAC, DC Output 40V, 70A
GPIB/RS232 interface