1. Probe station main body unit - 1SET
- 6“ ambient coaxial chuck_Low leakage current chuck
- Chuck Ground & Coaxial Cable Plug
- X/y Stage Travel:100 x 100mm, Resolution 10um Fine Knob type
- Z Up/down Travel 15mm, Resolution : 5um Fine Knob Type
- Platen : White Al Anodizing & Glass Coation for ESD
- Ground Block, 6 Pont
- Vacuum Switch for Positioner 6, On/off
- Microscope Bong Mount Precision
- Mount X/y Stage : Travel : 50 x 50mm, Resolution 5um
- Microscope 30mm Bong & Mount Jig Block
2. Kethley 4200A-SCS
(1) PMU
(2) SMU
(3) CVU
(4) RPM 통합 컨트롤
3.Precision Premier II
+-100V 강유전체 테스트