(1) Basic stage system
- XY-stage, linear motor, air bearing guide, encoder position control, and vacuum chuck
- System control electronics for encoders, stage, autofocus system and real time pixel generator
- Minimum feature size : ≦ 0.6um
- Maximum loading substrate size : 6inch wafer
- Minimum substrate size : 5 x 5mm2
- Maximum write area : 100×100mm2
- Substrate thickness: Max. 12mm
- Encoder resolution : 20nm
- Maximum write area : 100×100mm2
- Dimensions
: ≦ 630(W)x850(D)x750(H) mm
: ≦ 260kg
(2) Optical system
- Laser diode wavelength : 405nm 또는 390nm
- Lifetime : ≧ 10,000 hrs
- Write mode: ≦ Min. 0.6um
- Resolution: ≦ 0.6um
- Writing speed : ≧ 2.1 mm2/min
- Address grid : 20nm
- CD uniformity : ≦ Min. 200nm
- Alignment accuracy:
5X5mm2 일 때, 0.5um
- Real time optical autofocus
(3) Operating system
- PC system for system control and data conversion
- System control software and graphical user interface (MS Windows version)
- Conversion software
: Bianary: DXF, CIF, GDSII
: Gray Scale Exposure: BMP
- Basic Gray Scale Exposure : 128 level 이상