- Z-axis travel range : 1,000 mm
- Max. Sample weight : 400 kg
- Max. Sample diameter : ∅300 mm
- Alignment Accuracy : 2 um
- Centering measurement accuracy : 0.1 um
- Center thickness and air gap measurement accuracy : 2 um
- Air bearing spindle accuracy : 100 nm
- Max. optical sample thickness : 400 mm
- Number of surface : 20 surface or over
- Light Source : Red, Green, Blie, MWIR, LWIR